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Nanostructured Surfaces Using Thermal Nanoimprint Lithography: Applications In Thin Membrane Technology, Piezoelectric Energy Harvesting And Tactile Pressure Sensing
(Electrical Engineering, 2014-03-12)
Nanoimprint lighography (NIL) is emerging as a viable contender for fabrication of large-scale arrays of 5-500 nm features. The work presented in this dissertation aims to leverage the advantages of NIL for realization of ...