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Passivation Of Si (100) Surface And Fabrication Of Doping-free MOSFET
(Electrical Engineering, 2008-09-17)
Chalcogen atoms have been successfully used for the passivation of GaAs(100) as well as Ge(100) and Si(100) substrates. Unlike GaAs(100) and Ge(100), the native oxide(SiO2) of Si(100) substrate is not soluble in ammonium ...