SIMULATION AND DESIGN OF MICROBOLOMETERS FOR 5-14 µm WAVELENGTH AT OBLIQUE INCIDENCE
Abstract
A mathematical model was developed to calculate the total power absorbed and total power reflected for a microbolometer for oblique incidence of light viz. s and p polarization by varying the angle of incidence from 1 to 89 degrees. The mathematical model was simulated using matlab in five different sensor structures. A comparative study based on simulation involving the different sensor structures was done. The maximum partial absorbed power for s polarization was 0.9559-0.0000i, 0.9112-0.0000i, 0.9617-0.0000i, 0.3057-0.0000i, 0.9627-0.000i for sensor structure I, 1, 2, 3, 4 at angle of incidence of 73 degree, 1 degree, 66-67 degree, 1-3 degree, 60 degree for wavelength of 8 µm, 7 µm, 9 µm, 8 µm, 14 µm. The maximum partial absorbed power for p polarization was 0.9855-0.0000i, 0.9113-0.0000i, 0.9979-0.0000i, 0.3057-0.0000i, 0.9982-0.000i for sensor structure I, 1, 2, 3, 4 at angle of incidence of 68 degree, 1 degree, 73 degree, 1-3 degree, 39-40 degree for wavelength of 8 µm, 7 µm, 8 µm, 8 µm, 10 µm. The design aspect of the microbolometer was looked upon by replacing the existing sensor layer materials with some other materials and by doing performance comparison.