Resonance control of membrane reflectors with effective index engineering
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Date
2009-07-14Author
Zhou, Weidong
Chuwongin, Santhad
Qiang, Zexuan
Chen, Li
Pang, Huiqing
Ma, Zhenqiang
Yang, Hongjun
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Show full item recordAbstract
We report here broadband membrane reflectors based on Fano resonances in patterned silicon
nanomembranes. Resonance control of the reflectors was realized either by partially removing
buried oxide layer underneath the device layer or by controlled SiO2 film deposition on top of the
devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center
wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance
engineering for both narrowband filters and ultracompact broadband reflectors. © 2009 American
Institute of Physics.