Browsing by Subject "Flexible packaging"
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DESIGN AND FABRICATION OF SELF-PACKAGED, FLEXIBLE MEMS ACCELEROMETER AND ALUMINUM NITRIDE TACTILE SENSORS
(2018-04-18)The work presented in this dissertation describes the design, fabrication and characterization of a Micro Electro Mechanical System (MEMS) capacitive accelerometer on a flexible substrate. To facilitate the bending of the ...