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MEMS Piezoresistive Pressure Sensor On Flexible Substrates Using Nichrome And CNT/polyimide Nanocomposites Piezoresistors
(Electrical Engineering, 2010-11-01)
Micro pressure sensors using nichrome as piezoresistor were fabricated on silicon and flexible substrates. The pressure sensors on flexible substrate can be used for prosthetic skin applications. The devices were successfully ...