Now showing items 1-6 of 6

    • CCBDI Readout Circuit For YbaCuO Micromachined Microbolometers 

      Kumar, Sandeep (Electrical Engineering, 2007-09-17)
      Semiconducting YBaCuO (Yttrium-Barium-Copper-Oxide) as a new uncooled microbolometer material is evaluated for CMOS compatibility. By not requiring cryogenic cooling, the self-supporting semiconducting YBaCuO micromachined ...
    • Device Level Vacuum Packaged Microbolometers On Flexible Substrates 

      Mahmood, Aamer (Electrical Engineering, 2007-08-23)
      Micromachined microbolometers on flexible substrate have been fabricated and characterized. Liquid polyimide PI5878G made by HD Microsystems has been used to form the flexible substrate. Semiconducting Yttrium-Barium-Copper-Oxide ...
    • Flexible MEMS Sensors And Pyroelectric Thin Films 

      Ahmed, Moinuddin
      MEMS sensors on flexible substrates were developed and fabricated utilizing conventional lithography, deposition and etching tools. All of these sensors were fabricated in a MESA structure on the flexible substrates for ...
    • Integrated MEMS Microsensors 

      Chitteboyina, Murali M (Electrical Engineering, 2008-04-22)
      Many Micro-Electro-Mechanical Systems (MEMS) products have been commercialized at a fraction of the cost and size of conventional devices. Low cost, small sizes and multi-function are the ultimate objectives of commodity ...
    • RF Sputtered SixGe1-x and SixGe1-xOy Thin Films For Uncooled Infrared Detectors 

      Rana, Mukti M (Electrical Engineering, 2007-08-23)
      The objective of this work is to find a suitable combination of radio frequency (RF) sputtered SixGe1-x and SixGe1-xOy thin films for uncooled infrared detection. Thus, fabricating and characterizing microbolometers with ...
    • Ultra-thin Aluminum Nitride Thin Films for Flexible MEMS Sensors 

      Rayhan, Md Sajeeb (2016-09-14)
      Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography techniques in the class 100 clean room with a view to integrate ...