Browsing PhD Dissertations - DO NOT EDIT by Author "Rayhan, Md Sajeeb"

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    • Ultra-thin Aluminum Nitride Thin Films for Flexible MEMS Sensors 

      Rayhan, Md Sajeeb (2016-09-14)
      Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography techniques in the class 100 clean room with a view to integrate ...