Browsing PhD Dissertations - DO NOT EDIT by Author "Zhang, Ping"
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Design, Fabrication And Assembly Of 3-D Microstructures
Zhang, Ping (Electrical Engineering, 2007-08-23)The primary goal of a micro-electro-mechanical system (MEMS) is to integrate electronics, sensors and actuators into a tiny system, which can be easily fabricated and packaged. Currently there is no standard process for ...