ATTENTION: The works hosted here are being migrated to a new repository that will consolidate resources, improve discoverability, and better show UTA's research impact on the global community. We will update authors as the migration progresses. Please see MavMatrix for more information.
Show simple item record
dc.contributor.author | Kole, Ashutosh | en_US |
dc.date.accessioned | 2007-08-23T01:56:09Z | |
dc.date.available | 2007-08-23T01:56:09Z | |
dc.date.issued | 2007-08-23T01:56:09Z | |
dc.date.submitted | August 2005 | en_US |
dc.identifier.other | DISS-1043 | en_US |
dc.identifier.uri | http://hdl.handle.net/10106/136 | |
dc.description.abstract | This thesis presents the design, analysis, and fabrication of a novel polymer tube embedded in-plane micropump. The key component of the proposed micropump is a Parylene polymer tube that is embedded into the trench of a silicon die. Advantages of embedding a Parylene polymer tube are biocompatibility and leakage free environments. The issue of leakage of fluid presented in [1] is eliminated by inserting the polymer tube. The tube itself acts as a diaphragm, which transfers the force and motion of thermal actuators to fluid. The structural analysis and the fabrication of the Parylene tube along with the coupled-field multiphysics analysis of the electrothermal actuators are the challenging tasks involved. Compression ratio is computed, which determines the flow rate, and backpressure. 4 mm thick Parylene is conformally deposited on the nickel coated DRIE processed silicon wafer, and peeled off and two Parylene layers are bonded together to form a tube. | en_US |
dc.description.sponsorship | Agonafer, Dereje | en_US |
dc.language.iso | EN | en_US |
dc.publisher | Mechanical Engineering | en_US |
dc.title | Polymer Tube Embedded In-plane Micropump: Design, Analysis And Fabrication | en_US |
dc.type | M.S.M.E. | en_US |
dc.contributor.committeeChair | Agonafer, Dereje | en_US |
dc.degree.department | Mechanical Engineering | en_US |
dc.degree.discipline | Mechanical Engineering | en_US |
dc.degree.grantor | University of Texas at Arlington | en_US |
dc.degree.level | masters | en_US |
dc.degree.name | M.S.M.E. | en_US |
dc.identifier.externalLink | https://www.uta.edu/ra/real/editprofile.php?onlyview=1&pid=4 | |
dc.identifier.externalLinkDescription | Link to Research Profiles | |
Files in this item
- Name:
- umi-uta-1043.pdf
- Size:
- 1.886Mb
- Format:
- PDF
This item appears in the following Collection(s)
Show simple item record