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    • Nonlinear Control Of Microelectromechanical Systems (MEMS) Devices 

      Owusu, Kwadwo Osei (Electrical Engineering, 2007-08-23)
      Different actuation principles have been developed for MEMS but electrostatic actuators are the most common. A significant drawback in the use of electrostatic actuators for some applications is their nonlinear voltage to ...