Browsing Theses and Dissertations(library) by Author "Patel, Bhavik C."

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    • Thermo-mechanical Analysis Of Nano-imprint Lithography 

      Patel, Bhavik C. (Mechanical Engineering, 2013-10-22)
      Nanoimprint Lithography is being explored by the semiconductor industries for future high volume fabrication of silicon chips, memory devices and patterned media. Nanolithography and Microlithography has played pivotal ...