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NOVEL VIBRATIONAL ENERGY HARVESTERS UTILIZING PIEZOELECTRIC Li-DOPED ZnO NANOWIRES AND THE TRIBOELECTRIC EFFECT
(2020-06-24)
Vibration sources are omnipresent everywhere in our regular lives including the automobiles, aircraft, human body motion, wind flow, and water waves. Vibrational energy harvesters are electromechanical systems that can ...
DESIGN AND FABRICATION OF SELF-PACKAGED, FLEXIBLE MEMS ACCELEROMETER AND ALUMINUM NITRIDE TACTILE SENSORS
(2018-04-18)
The work presented in this dissertation describes the design, fabrication and characterization of a Micro Electro Mechanical System (MEMS) capacitive accelerometer on a flexible substrate. To facilitate the bending of the ...