Browsing Department of Materials Science and Engineering by Author "Lu, Po-Cheng"
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Study of Conduction Behavior in Dielectrics in Chip Level Interconnects: Detection of Defects in Al/SiO2 Interconnects
Lu, Po-Cheng; 0000-0003-3565-9449 (2018-12-18)This dissertation presents four different electrical measurement techniques to detect structural defects in Al/SiO2 interconnects. These techniques, namely 1) polarity dependence measurement, 2) current voltage measurement, ...