Browsing Department of Materials Science and Engineering by Author "Pandey, Akanksha"
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Enhanced Mechanical Stability Of Interlayer Dielectrics With Self-organized Molecular Pores
Pandey, Akanksha (Materials Science & Engineering, 2015)In order to reduce resistance-capacitance delays in interconnect structures, ultralow-k films are used as interlayer dielectric materials. In most cases the preferred method to achieve the lower dielectric constant is the ...