Browsing Department of Materials Science and Engineering by Subject "Reactive ion etching"
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A NOVEL APPROACH FOR FABRICATION OF SINGLE SILICON/SILICON OXIDE NANOPILLARS AT PRECISE LOCATIONS
(2016-12-15)Nanopillars exhibit novel electrical and optical properties which could not be obtained from bulk materials. Many of their practical applications would require controlled placement of nanopillars at exact locations. However, ...