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Design And Fabrication Of Piezoelectric Micro Generator Using Laser Micromachining And MEMS Technique
(Materials Science & Engineering, 2008-09-17)
An energy harvesting device based on PbPb(Zr0.52Ti0.48)O3-Pb(Zn1/3Nb2/3)O3 ceramics was fabricated by using laser micromachining technique. It was found that the laser machining process did not have a significant effect ...