Design And Fabrication Of Iridium Oxide-based Multi-electrode Array For Biomedical Applications

Abstract

Multi-electrode array (MEA) has emerged as one of the most important and common tools to monitor physiological and biological signals. Advanced micro-electro-mechanical systems (MEMS) and innovative nanofabrication technologies provide means to fabricate micro-scale MEAs for implantable bio-applications. One of the prominent advantages of such miniature electrodes is to minimize tissue damage or injuries during surgical implantation. The micro-scale electrodes are normally coated with materials or functionalized with proteins and enzymes to sense different analyates. Iridium oxide (IrOx) owning with many important traits such as biocompatibility, high corrosion resistance in electrolyte materials, pH-sensitivity, large surface-to-volume ratio, and high charge storage has a broad range of applications in electrochemistry and biology. In this dissertation, bulk and nanostructured IrOx were grown for micro-MEAs on both flexible and rigid substrates for various applications such as pH sensors, dopamine and L-glutamate sensors.