Browsing Department of Electrical Engineering by Author "Chitteboyina, Murali M"

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Integrated MEMS Microsensors

Chitteboyina, Murali M (Electrical Engineering, 2008-04-22)

Many Micro-Electro-Mechanical Systems (MEMS) products have been commercialized at a fraction of the cost and size of conventional devices. Low cost, small sizes and multi-function are the ultimate objectives of commodity ...

Browsing Department of Electrical Engineering by Author "Chitteboyina, Murali M"

Integrated MEMS Microsensors ﻿

Integrated MEMS Microsensors