Browsing Department of Electrical Engineering by Author "Mahmood, Md Sohel"
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DESIGN AND FABRICATION OF SELF-PACKAGED, FLEXIBLE MEMS ACCELEROMETER AND ALUMINUM NITRIDE TACTILE SENSORS
Mahmood, Md Sohel; 0000-0003-0960-7725 (2018-04-18)The work presented in this dissertation describes the design, fabrication and characterization of a Micro Electro Mechanical System (MEMS) capacitive accelerometer on a flexible substrate. To facilitate the bending of the ...