Browsing Department of Electrical Engineering by Author "Owusu, Kwadwo Osei"
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Nonlinear Control Of Microelectromechanical Systems (MEMS) Devices
Owusu, Kwadwo Osei (Electrical Engineering, 2007-08-23)Different actuation principles have been developed for MEMS but electrostatic actuators are the most common. A significant drawback in the use of electrostatic actuators for some applications is their nonlinear voltage to ...