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RF Sputtered SixGe1-x and SixGe1-xOy Thin Films For Uncooled Infrared Detectors
(Electrical Engineering, 2007-08-23)
The objective of this work is to find a suitable combination of radio frequency (RF) sputtered SixGe1-x and SixGe1-xOy thin films for uncooled infrared detection. Thus, fabricating and characterizing microbolometers with ...