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Ultra-thin Aluminum Nitride Thin Films for Flexible MEMS Sensors
(2016-09-14)
Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography
techniques in the class 100 clean room with a view to integrate ...
LABEL-FREE REFRACTIVE INDEX SENSING WITH FREE-SPACE COUPLED PHOTONIC CRYSTAL SLABS
(2017-12-07)
Label-free optical resonance sensors can detect small changes of refractive index (RI), which could be used for biochemical molecular detection, drug screening or gas detection. One of the most critical parameters in these ...
Development, Testing and Characterization of Electronic Skins for Robots
(2015-12-09)
The main purpose of this thesis is to test and characterize newly developed pressure sensors integrated into robot skin and understand their behavior for different testing parameters such as sensor and skin materials and ...